PEM-1000 Photon Emission Microscope

Images at 20X Magnification: | DUT | EMI | Superimposed |

Images at 0.7X, with TNP's (patent pending) MacroLens: | DUT | [EMI | Superimposed |

 

 

STATE-OF-THE-ART

Functionality

TNP’s Revolutionary, (patent pending) Laser Marking System

Once you locate a fault , TNP’s exclusive laser system marks and pinpoints it. With the mark in place, you can easily re-locate the fault under SEM or FIB.

Value

Retrofit Existing Mitutoyo Microscope, or Get the Complete System

A great value in Photon Emission microscopy becomes even better when you purchase it as an upgrade to your existing probe station .

Technology

Macro Lens (patent pending)
Magnification: 0.7 x
Working distance: 20mm
N.A.: 0.3

Software:
Windows interface control for all operations

 

Compare PEM-1000 quality, prices, and specifications to any other system!

 


THE TNP's PEM-1000 Series:

Unsurpassed Quality in Photon Emission Microscopy

That Breaks New Ground in Functionality and Value

As semiconductor devices have grown increasingly sophisticated and complex, photon emission microscopy has become an indispensable tool for fault detection

At last, innovations by TNP Instruments have not only simplified the tedious fault identification process, but also dramatically improved the affordability of photon emission microscopy equipment.

 

Two PEM-1000 Exclusives


Get the System You Need at a Fraction of the Cost

With the introduction of TNP ’s PEM-1000 series, photon microscopy users enjoy an unprecedented variety of options and choices—not to mention the most outstanding value than any ever offered in the industry.

PEM-1000A, TNP Mitutoyo Upgrade/Retrofit Kit

Until now, virtually all photon emission devices have come with a proprietary microscope, adding to cost and making upgrades virtually impossible.

Now, with TNP Model PEM-1000A, if you already own a probe station, it can easily be retrofitted for photon emission microscopy. The kit comes with dual imaging unit, cooled CCD Camera, Laser Marking Unit, and software to equip your existing probe station as a fully functional photon emission unit.

PEM-1000B, The Complete TNP System

If you’re looking for a complete photon-emission system, Model PEM-1000B includes a Mitutoyo microscope and other components.

Either way, with TNP ’s low cost and Laser Marking System, you’ll get more functionality and value than with any other system available today.

 

TNP’s New Laser Marking System Streamlines Fault Detection

Until TNP unveiled the PEM-1000 series, the process of fault identification in micro-circuitry was a truly arduous one. Because a wafer may consist of millions of identical components, the challenge was not to locate a fault at a location. It was to return to the precise location of the fault in the next step of failure analysis.

 

TNP TO THE RESCUE

TNP ’s Laser Marking System streamlines the fault isolation process.

First, TNP’s highly sensitive Macro Lens enables user to view the whole device and to spot the trouble area. Switching to higher magnification, the user can Laser Mark the location before removing D.U.T from the Photon Emission Microscope.

Later, when the user examines the wafer under SEM or FIB, the mark assures that the user returns precisely to the "scene of the crime". You never run the risk of examining an improper location.

 

 

 

Specifications


Available as a standalone unit or in an upgrade kit for an existing standard Mitutoyo microscope, the TNP PEM-1000 series combines an exclusive laser marking system with state-of-the-art computer image processing and night vision technologies.

On the PEM-1000 screen, photons emitted from the D.U.T. defects appear as bright spots, superimposed on an image of the D.U.T. at the same magnification.

The image can be observed directly from the screen, or recorded to create a continuous action record. Pictures can also be stored on disk for further analysis in common image formats as TIF, BMP, and others.

Dual-imaging Optical Adapter: Fits FS-60 Microscope

TNP’s proprietary Macro Lens:

  • N.A.: 0.3
  • Magnification: 0.7 x
  • Working distance:20mm (nominal)
  • Field of View: 17.5 x 13.5 mm

Options:

  • Packed devices or wafer level Backside Emission Inspection
  • MTI Microscope and Lens
  • Narrow band-pass filter.
  • CCD Camera
  • Low-Light Camera with photo-multiplier (see Insert for specifications).
  • Low-Light Cooled Camera (see Insert for specifications).
  • Laser Marking System (see Insert for specifications).
  • Motorized Turret (MT-405).
  • Remote Focus Controller (AF-405).
  • Objective lenses: 5x, 10x, 20x, 50x, 100x (all NIR class).
  • Color printer

Copyright © 1999 TNP Instruments, Inc, California, USA

webmasters@tnpinstrument.com