Specifications
The
TNP Model 6400-L offers an exceptional Laser Cutting System that
exceeds the requirements for Flat Panel Display, Large Photo-mask, and Color
Filter Repair. Fully automatic remote
controlled, the 6400-L comes with single, dual, or triple wavelength to
achieve optimum results in the removal of Aluminum, Chromium, ITO, and
Polyimide on panel before or after assembly.
Laser System
The TNP Model 6400-L provides a convenient laser system
operation for LCD repair. Designed as
a one-step operation, and accompanied with customized software, the 6400-L
achieves optimum results in the precise removal of aluminum, chromium ITO,
and polyimide. Fully controlled and
operated away from the microscope, the 6400-L comprises a complete automated
repair station.
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Wavelength:
1064/532/355 nanometer. Nd:
YAG Laser
Pulse Width: 7 nanosecond
Energy: .6mJ
Cutting Size:
50X obj. 50 x 50 Micron Max.
1.2 x 1.2 Micron Min.
100X obj.
20 x 20 Micron Max.
(Optional) 0.6 x 0.6
Micron Min.
Cooling: Ambient Air
Beam Mode: TEMoo
Motorized Laser Theta Stage
Computer Control Unit
Software Operates under Windows 95/98/NT. “Point-and-Shoot” on-screen
navigation.
Multimedia Video Digitizing graphics card
displays live video image on screens. Supports point-and-shoot;
drag-and-drop; and video image measuring, retrieval, and
printing.
Input Sources Reads data from
KLA Acrotech, KLA Tencor,
PDI,Orbotech, Hitachi Engineering Research, and Tokyo Cathode
Lab. Other manufacturers also
available.
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Motorized Gantry System
Travel Up to 2 x 2 meters
Accuracy ± 20 Micron over
travel distance
Repeatability 2 Micron
Resolution 1 Micron
Substrate Holder Up to 2 x 2 meters
Bottom illumination covers entire large photo-mask area
Optional Features
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Auto Loader/Unloader
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AF-405 Auto Focus
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MT-405 Motorized Turret
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Motorized Laser Theta Stage
Anti-Vibration Table
Active air provides vibration isolation for
small geometry cutting.
Size and Weight
Main Unit For 1 x 1 meter system: Approximately
1,800 pounds
60”
x 66” x 57”
Instrument Rack Standard 19" cabinet Approximately 400
pounds
24”
x 28” x 75”
Total Weight Approximately 2,200
pounds
Facility Requirements
Power 110/220 VAC, 50/60 Hz,
Single
Phase, 12 Ampere
Air 80 psi
Vacuum 18 mHg
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